Accurate contactless measurement of surface and micro sample temperatures
Sensors, Devices and Components
Ref.-Nr.: 0041-5601-WT
Technology
We developed a novel hot stage design with independent tip and sample heating to characterize materials at high temperatures. It comprises of two independent hot stages each carrying either the sample or the indenter tip. The sample surface and the indenter tip reach temperatures of >800°C. The unique approach (see Fig. 1) is able to estimate the absolute sample surface temperature by a monitoring the thermal fields via a smart arrangement of thermocouples inside the stage. The accuracy of the estimated absolute surface temperature is better than ±2.5° at 600°C. The approach does not require a thermocouple at the sample, and is therefore avoiding any damage to the micron-sized features being mechanically tested. The device assembly with both the stages is depicted in Fig. 2.
Advantages
- Prediction of the surface temperature by smart monitoring of spatial and temporal evolution of the temperature distribution.
- Accuracy of the predicted absolute temperature better ±2.5°C at 600°C
- Unprecedented fast and reliable stabilization
Patent Information
A European patent application has been filed in 2018.
PDF Download
- Ref.-Nr.: 0041-5601-WT (267.8 KiB)
Contact
PD Dr. Wolfgang Tröger
Senior Patent- & License Manager
Physicist
Phone: +49 89 / 29 09 19-27
Email:
troeger@max-planck-innovation.de